Silicon Nanowire FET Hydrogen gas Sensor: Design Aspects
نویسنده
چکیده
Palladium (Pd) is considered as ideal hydrogen sensing material due to its properties as high sensitivity and selectivity to hydrogen gas, fast response and reversible room temperature operation.Silicon nanowire (SiNW) functionalized with Pd based hydrogen gas nanowire sensor having quantum confinement effect and high sensitivity because of high surface to volume ratio of SiNW. This paper highlights the design aspects with physical dimensions and response of palladium film functionalized silicon nanowire based hydrogen gas sensor.
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